China Begins Production of Home-Grown DUV Chipmaking Tools
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China Begins Production of Home-Grown DUV Chipmaking Tools
- China has reportedly started mass production of domestically developed immersion Deep Ultraviolet (DUV) lithography machines, a critical technology for advanced chipmaking, with approximately five units expected this year.
- Shanghai Aishengna Electronic Technology Group, a state-owned company, is reportedly leading the production efforts, incorporating teams from other Chinese lithography startups.
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China has initiated the mass production of its own immersion Deep Ultraviolet (DUV) lithography machines, a significant step in its pursuit of semiconductor self-sufficiency. This development, reported on July 28, 2026, involves a state-owned company in Shanghai, Shanghai Aishengna Electronic Technology Group, leading the manufacturing efforts. The company has reportedly integrated teams from other Chinese lithography startups, including Yuliangsheng and Shanghai Micro Electronics Equipment (SMEE).
Immersion DUV lithography is essential for producing a wide array of chips and can be utilized for more advanced semiconductors through multi-patterning techniques. While these domestically produced machines are seen as a breakthrough, they are expected to require further testing and are not yet on par with the performance and reliability of competing models from leading international suppliers like ASML.
Initial production targets are modest, with around five DUV machines anticipated this year and approximately 20 in 2027. These machines are expected to be delivered to major Chinese chipmakers such as Semiconductor Manufacturing International Corp (SMIC), Hua Hong Semiconductor, and ChangXin Memory Technologies (CXMT). China’s push for semiconductor independence has been accelerating, particularly following increased export restrictions on advanced chipmaking tools. The country aims for 80% self-sufficiency in its semiconductor industry by 2030.